VERTICAL CAVITY SURFACE EMITTING LASER WITH INTEGRATED PHOTODIODE
A Vertical Cavity Surface Emitting Laser (VCSEL) comprises an optical resonator (18). The optical resonator (18) comprises a first mirror (12), an active region (14) for generation of laser light, and a second mirror (16), wherein the active region (14) is arranged between the first and second mirro...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A Vertical Cavity Surface Emitting Laser (VCSEL) comprises an optical resonator (18). The optical resonator (18) comprises a first mirror (12), an active region (14) for generation of laser light, and a second mirror (16), wherein the active region (14) is arranged between the first and second mirrors (12, 16). A photodiode (34) is integrated in the optical resonator (18). The photodiode (34) comprises an absorption region (20) having a plurality of absorbing layers configured to absorb generated laser light, wherein the absorbing layers are arranged spaced apart from one another by a distance d which satisfies the condition: d = (2k-1) λ / (4 m), wherein λ is the wavelength of the laser light in the absorption region (20), and k and m are natural numbers ≥ 1. An optical sensor and a method of producing a VCSEL are also described. |
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