PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD FOR PULSED PROVISION OF ELECTRICAL ENERGY

A plasma generator and a method for the pulsed provision of electrical power having a frequency of at least 40 KHz to at least two process chambers are described. The plasma generator comprises: a control unit configured to obtain and evaluate process data about processes in the at least two process...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NACHBAUER, Florian, SCHULZ, Sebastian Hubertus, WALK, Felix, PERNAU, Thomas
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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