DUMMY WAFER

DUMMY WAFER

A dummy wafer (100) includes a planar heater (120) and a pair of plate-shaped members (110A, 110B) formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater (120) is sandwiched by the plate-shaped members (110A, 110B).

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Hauptverfasser: KOMIYA, Hiroaki, KATO, Yoshiyasu, NAKAYAMA, Hiroyuki, KASAI, Shigeru, AKAIKE, Yutaka
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator KOMIYA, Hiroaki
KATO, Yoshiyasu
NAKAYAMA, Hiroyuki
KASAI, Shigeru
AKAIKE, Yutaka
description A dummy wafer (100) includes a planar heater (120) and a pair of plate-shaped members (110A, 110B) formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater (120) is sandwiched by the plate-shaped members (110A, 110B).
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title DUMMY WAFER
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