METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY

A method for manufacturing a membrane assembly for EUV lithography, the method including: providing a stack including: at least one membrane layer supported by a planar substrate, wherein the planar substrate has an inner region and a border region around the inner region; and a first sacrificial la...

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Bibliographische Detailangaben

Hauptverfasser:	KLOOTWIJK, Johan Hendrik, ZDRAVKOV, Aleksandar Nikolov, VALEFI, Mahdiar, KLEIN, Alexander Ludwig, NOTENBOOM, Arnoud Willem, BALTUSSEN, Sander, KURGANOVA, Evgenia, VAN DEN EINDEN, Wilhelmus Theodorus Anthonius, WONDERGEM, Hendrikus Jan, KUZNETSOV, Alexey Sergeevich, FRANKEN, Johannes Christiaan Leonardus, VAN DER WOORD, Ties Wouter, VAN ZWOL, Pieter-Jan, DE GRAAF, Dennis, GIESBERS, Adrianus Johannes Maria, VAN DE KERKHOF, Marcus Adrianus, KNAPEN, Peter Simon Antonius
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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