METHOD AND DEVICE FOR DEPOSITING A NANO-OBJECT

METHOD AND DEVICE FOR DEPOSITING A NANO-OBJECT

A method for depositing an object, including: -approaching, in an enclosure, a holder in the direction of a carrier substrate, then-transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside...

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Hauptverfasser: DESJARDINS, Matthieu, CUBAYNES, Tino, DELBECQ, Matthieu, KONTOS, Takis, PALOMO, José, DARTIAILH, Matthieu
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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creator DESJARDINS, Matthieu
CUBAYNES, Tino
DELBECQ, Matthieu
KONTOS, Takis
PALOMO, José
DARTIAILH, Matthieu
description A method for depositing an object, including: -approaching, in an enclosure, a holder in the direction of a carrier substrate, then-transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10−6 bar.
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subjects MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
title METHOD AND DEVICE FOR DEPOSITING A NANO-OBJECT
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