METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

A method for operating a multi-beam particle beam microscope includes: scanning a multiplicity of particle beams over an object; directing electron beams emanating from impingement locations of the particle beams at the object onto an electron converter; detecting first signals generated by impingin...

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Hauptverfasser: DELLEMANN, Gregor, ZEIDLER, Dirk, SCHEUNERT, Gunther
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator DELLEMANN, Gregor
ZEIDLER, Dirk
SCHEUNERT, Gunther
description A method for operating a multi-beam particle beam microscope includes: scanning a multiplicity of particle beams over an object; directing electron beams emanating from impingement locations of the particle beams at the object onto an electron converter; detecting first signals generated by impinging electrons in the electron converter via a plurality of detection elements of a first detection system during a first time period; detecting second signals generated by impinging electrons in the electron converter via a plurality of detection elements of a second detection system during a second time period; and assigning to the impingement locations the signals which were detected via the detection elements of the first detection system during the first time period, for example on the basis of the detection signals which were detected via the detection elements of the second detection system during the second time period.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
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