USING IDENTIFIERS TO MAP EDGE RING PART NUMBERS ONTO SLOT NUMBERS

Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to det...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHANG, Thomas, SEVILLANO, Evelio, O'DONNELL, Robert, WASSEI, Peter R, ROPES, Ronda, HILL, Bridget
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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