BOTTOM EDGE RINGS

A bottom ring is configured to support a moveable edge ring. The edge ring is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and a plurality of vertical guide chann...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOKAIRIN, Shawn E S, MCCHESNEY, Jon, RATHNASINGHE, Hiran Rajitha
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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