METHOD FOR INSPECTION OF A TARGET OBJECT, CONTROL SYSTEM AND INSPECTION SYSTEM

A method for inspection of a target object, the method including irradiating a reference surface having a non-flat reference profile with radiation; determining reference response data based on detected radiation having interacted with the reference surface; irradiating a target object with radiatio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN MECHELEN, Jacobus Lodevicus Martinus, MAAS, Deran, FRANK, Andreas
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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