LASER DEVICE AND DEHUMIDIFICATION MANAGEMENT METHOD FOR LASER DEVICE

A laser device 100 includes a laser oscillator 10, a dehumidifier 11, and a controller 9 controlling an operation of the dehumidifier 11. The controller 9 controls the dehumidifier 11 such that the dew point W inside the laser oscillator 10 is lower than the first dew point W1H when a monolayer or l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RYUDO Makoto, NISHIO Masatoshi, WANG Jingbo
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
Online-Zugang:	Volltext bestellen
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