BRAZING PROCESSES FOR JOINING CERAMICS AND METALS, AND SEMICONDUCTOR PROCESSING AND INDUSTRIAL EQUIPMENT USING SAME

A joining method includes placing a brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly and placing the components of said joining pre-assembly into a process chamber. Oxygen is removed from said process...

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Bibliographische Detailangaben
Hauptverfasser: ELLIOT, Alfred, Grant, ELLIOT, Brent, D. A
Format: Patent
Sprache:eng ; fre ; ger
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