CAPACITIVE SENSOR HAVING TEMPERATURE STABLE OUTPUT

CAPACITIVE SENSOR HAVING TEMPERATURE STABLE OUTPUT

In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an envi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VAN DER AVOORT, Cas, PIJNENBURG, Remco Henricus, SINGULANI, Anderson, WUNNICKE, Olaf, GOOSSENS, Martijn, BESLING, Willem Frederik, VANHELMONT, Frederik
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.