CHARGED PARTICLE BEAM DEVICE

A particle concentration, particularly an asbestos concentration, is calculated with high accuracy. A charged particle beam device 10 includes an electron microscope 11 and a control unit 13. The electron microscope 11 irradiates a sample 51 with an electron beam 50 to capture a microscope image. The control unit 13 determines a particles detected from the microscope image captured by the electron microscope 11, and calculates the particle concentration of the determined particle. The control unit includes an image acquisition unit 32 and a determination unit 33. The image acquisition unit 32 acquires the microscope image captured by the electron microscope 11. The determination unit 33 determines whether the particle as a detection target exists in the microscope image acquired by the image acquisition unit 32, counts the number of particle as a detection target when it is determined that the particle as a detection target exists, and calculates the particle concentration based on the counted number of particle.