ION GUIDE COMPRISING ELECTRODE WIRES AND ION BEAM DEPOSITION SYSTEM

Disclosed herein is an ion guide (32) for guiding an ion beam along an ion path, said ion guide (32) having a longitudinal axis (48) which corresponds to said ion path. Said ion guide (32) comprises a plurality of electrode plates (44) which are arranged perpendicularly to the longitudinal axis (48)...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAPOSI, Tobias, WALZ, Andreas, SCHLICHTING, Hartmut, BARTH, Johannes
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!