PARTLY SEALED ION GUIDE AND ION BEAM DEPOSITION SYSTEM

PARTLY SEALED ION GUIDE AND ION BEAM DEPOSITION SYSTEM

Disclosed herein is an ion guide (32) for guiding an ion beam along an ion path, said ion guide (32) having a longitudinal axis (48) which corresponds to said ion path. Said ion guide (32) comprises a plurality of electrode plates (44) which are arranged perpendicularly to the longitudinal axis (48)...

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Hauptverfasser: KAPOSI, Tobias, WALZ, Andreas, SCHLICHTING, Hartmut, BARTH, Johannes
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator KAPOSI, Tobias
WALZ, Andreas
SCHLICHTING, Hartmut
BARTH, Johannes
description Disclosed herein is an ion guide (32) for guiding an ion beam along an ion path, said ion guide (32) having a longitudinal axis (48) which corresponds to said ion path. Said ion guide (32) comprises a plurality of electrode plates (44) which are arranged perpendicularly to the longitudinal axis (48), each electrode plate (44) having an opening and being arranged such that said longitudinal axis (48) extends through its respective opening, wherein said openings collectively define an ion guide volume (49). The ion guide (32) extends or is configured to extend through a separation wall (20) separating adjacent first and second pumping chambers (12, 14). The ion guide (32) has a first portion (52), in which gaps are formed between at least some of said electrode plates (44) such that uncharged gas can escape from said ion guide volume (49), wherein said first portion (52) is completely located in said first pumping chamber (12). A second portion (54), in which sealing elements (46) are arranged between adjacent electrode plates (44), prevents neutral gas from escaping from that portion of the ion guide volume (49) between adjacent electrode plates (44), said second portion (54) extends at least from said separation wall (20) into said second pumping chamber (14).
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A second portion (54), in which sealing elements (46) are arranged between adjacent electrode plates (44), prevents neutral gas from escaping from that portion of the ion guide volume (49) between adjacent electrode plates (44), said second portion (54) extends at least from said separation wall (20) into said second pumping chamber (14).</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title PARTLY SEALED ION GUIDE AND ION BEAM DEPOSITION SYSTEM
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