ABNORMALITY DETERMINATION ASSISTANCE DEVICE

The abnormality determination support apparatus comprises an analysis object data preparation unit, a primary determination unit, and a secondary determination unit. The analysis object data preparation unit acquires a time-series signal representing at least one of a state of the manufacturing faci...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IMANARI, Hiroyuki, SHIMODA, Naoki
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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