METHOD FOR MANUFACTURING FLOW PATH DEVICE
To provide a method for manufacturing a flow path device internally provided with a flow path for allowing a liquid to flow by compression bonding two or more members to each other, wherein the hydrophilic property of a surface of the flow path can be maintained for a long period of time. A flow pat...
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| creator | FUJIMOTO, Takashi SENZAKI, Takahiro KAMIZONO, Takashi |
| description | To provide a method for manufacturing a flow path device internally provided with a flow path for allowing a liquid to flow by compression bonding two or more members to each other, wherein the hydrophilic property of a surface of the flow path can be maintained for a long period of time. A flow path device is manufactured by forming a hydrophilic coating film using a treatment liquid including a hydrophilizing agent in at least one member of the members, the coating film covering a surface of the member at a side to be joined to another member, then irradiating only a joining surface of the hydrophilic coating film with ultraviolet rays or plasma derived from an oxygen-containing gas in the member having the hydrophilic coating film, and irradiating at least the joining surface with ultraviolet rays or plasma derived from an oxygen-containing gas in a member having no hydrophilic coating film, and compression bonding the two or more members having been subjected to such treatment. |
| format | Patent |
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| language | eng ; fre ; ger |
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| subjects | CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | METHOD FOR MANUFACTURING FLOW PATH DEVICE |
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