OPTICAL MEASUREMENT METHOD, OPTICAL MEASUREMENT DEVICE, OPTICAL MEASUREMENT PROGRAM, AND RECORDING MEDIUM FOR RECORDING OPTICAL MEASUREMENT PROGRAM
A semiconductor device inspection apparatus includes: a light sensor that detects light from a semiconductor device as a DUT to which an electric signal has been input; an optical system that guides light from the semiconductor device to the light sensor; and a control device electrically connected...
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| creator | HOTTA Kazuhiro SHIMASE Akira |
| description | A semiconductor device inspection apparatus includes: a light sensor that detects light from a semiconductor device as a DUT to which an electric signal has been input; an optical system that guides light from the semiconductor device to the light sensor; and a control device electrically connected to the light sensor. The control device includes: a data reading unit that reads mask data indicating a mask layout of the semiconductor device; a search unit that searches for a position of a transistor in the semiconductor device on the basis of polygon data of a gate layer of the semiconductor device included in the mask data; a setting unit that sets the searched position of the transistor as an optical measurement target position; and a measurement unit that performs optical measurement for the set optical measurement target position to acquire a measurement result. |
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| language | eng ; fre ; ger |
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| subjects | MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | OPTICAL MEASUREMENT METHOD, OPTICAL MEASUREMENT DEVICE, OPTICAL MEASUREMENT PROGRAM, AND RECORDING MEDIUM FOR RECORDING OPTICAL MEASUREMENT PROGRAM |
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