MULTI-BEAM SCANNING TRANSMISSION CHARGED PARTICLE MICROSCOPE

Techniques for multi-beam scanning transmission charged particle microscopy are disclosed herein. An example apparatus at least includes a charged particle beam column to produce a plurality of charged particle beams and irradiate a specimen with each of the plurality of charged particle beams, and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mohammadi-Gheidari, Ali, Lazi, Ivan, Bosch, Eric Gerardus Theodoor, Veen, van, Gerard Nicolaas Anne
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!