SCANNING TRANSMISSION ELECTRON MICROSCOPE AND ABERRATION CORRECTION METHOD

In a scanning transmission electron microscope, a control unit performs: processing of calculating a first auto-correlation function that is an auto-correlation function of a first scanning transmission electron microscope image; processing of acquiring a first intensity profile along a straight lin...

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Bibliographische Detailangaben
Hauptverfasser: MORISHITA, Shigeyuki, CHIYO, Izuru
Format: Patent
Sprache:eng ; fre ; ger
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