WAFER-LEVEL MANUFACTURE OF MICRO-DEVICES AND RELATED TWO-PIECE DEVICES, IN PARTICULAR MICRO-OPTICAL SYSTEMS
The device (10) comprises a first member (1) and a second member (2) which are stacked upon each other in a direction vertical direction. The first and second members comprise a central portion (C1; C2) each, and the first member (1) comprises at least a first distancing element (4) abutting the sec...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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