CAPACITIVE PRESSURE SENSORS AND OTHER DEVICES HAVING A SUSPENDED MEMBRANE AND HAVING ROUNDED CORNERS AT AN ANCHOR EDGE

Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BESLING, Willem Frederik Adrianus, VAN DER AVOORT, Cas, FAES, Alessandro, SIEGERT, Joerg, WUNNICKE, Olaf, PIJNENBURG, Remco Henricus Wilhelmus
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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