CAPACITIVE PRESSURE SENSORS AND OTHER DEVICES HAVING A SUSPENDED MEMBRANE AND HAVING ROUNDED CORNERS AT AN ANCHOR EDGE
Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding t...
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| creator | BESLING, Willem Frederik Adrianus VAN DER AVOORT, Cas FAES, Alessandro SIEGERT, Joerg WUNNICKE, Olaf PIJNENBURG, Remco Henricus Wilhelmus |
| description | Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding the cavity, wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners. |
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In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding the cavity, wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | CAPACITIVE PRESSURE SENSORS AND OTHER DEVICES HAVING A SUSPENDED MEMBRANE AND HAVING ROUNDED CORNERS AT AN ANCHOR EDGE |
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