MOUNTING TABLE, AND METHOD OF MANUFACTURING THE MOUNTING TABLE

There is provided a mounting table (10) on which a workpiece (W) is mounted, including: a plurality of layers including a ceiling layer (110) having a front surface on which the workpiece (W) is mounted, and a heating layer (130) formed at a rear surface side of the ceiling layer (110) and configure...

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1. Verfasser:	Kasai, Shigeru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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creator	Kasai, Shigeru
description	There is provided a mounting table (10) on which a workpiece (W) is mounted, including: a plurality of layers including a ceiling layer (110) having a front surface on which the workpiece (W) is mounted, and a heating layer (130) formed at a rear surface side of the ceiling layer (110) and configured to heat the ceiling layer (110), the plurality of layers being stacked above one another. Each of the plurality of layers is formed by a silicon single crystal substrate or a silicon polycrystalline substrate. Each of the plurality of layers is bonded to a different layer which is adjacent in a stacking direction through oxide films (111, 121, 122, 131, 132, 141, 142, 152) formed on the silicon single crystal substrate or the silicon polycrystalline substrate.
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language	eng ; fre ; ger
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subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
title	MOUNTING TABLE, AND METHOD OF MANUFACTURING THE MOUNTING TABLE
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