AQUEOUS ALKALINE PRE-TREATMENT SOLUTION FOR USE PRIOR TO DEPOSITION OF A PALLADIUM ACTIVATION LAYER, METHOD AND USE THEREOF

The invention relates to an aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer on a substrate in manufacturing an article with an integrated circuit and a method and use thereof, wherein the solution comprises:- at least one hydroxycarboxylic acid or...

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Hauptverfasser: Bremmert, Stefanie, Wurdinger, Kay, Gregoriades, Dr. Laurence John, Gernhard, Marius
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Sprache:eng ; fre ; ger
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creator Bremmert, Stefanie
Wurdinger, Kay
Gregoriades, Dr. Laurence John
Gernhard, Marius
description The invention relates to an aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer on a substrate in manufacturing an article with an integrated circuit and a method and use thereof, wherein the solution comprises:- at least one hydroxycarboxylic acid or salt thereof according to the general formula (I)         [RCH2-(RCH)n-COO-]mMm+     (I)wherein n is integer from 2 to 4 and m is 1 or 2,R is independently H or OH with proviso that at least one R is OH, and whereinMm+with m: 1 is hydrogen, ammonium or alkali metal; or Mm+with m: 2 is earth alkali metal,- at least one polyoxyethylene sorbitan fatty acid ester derivative,- at least one sulphonated fatty acid or a salt thereof.
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Gernhard, Marius</creatorcontrib><description>The invention relates to an aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer on a substrate in manufacturing an article with an integrated circuit and a method and use thereof, wherein the solution comprises:- at least one hydroxycarboxylic acid or salt thereof according to the general formula (I)         [RCH2-(RCH)n-COO-]mMm+     (I)wherein n is integer from 2 to 4 and m is 1 or 2,R is independently H or OH with proviso that at least one R is OH, and whereinMm+with m: 1 is hydrogen, ammonium or alkali metal; or Mm+with m: 2 is earth alkali metal,- at least one polyoxyethylene sorbitan fatty acid ester derivative,- at least one sulphonated fatty acid or a salt thereof.</description><language>eng ; fre ; ger</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; 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language eng ; fre ; ger
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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title AQUEOUS ALKALINE PRE-TREATMENT SOLUTION FOR USE PRIOR TO DEPOSITION OF A PALLADIUM ACTIVATION LAYER, METHOD AND USE THEREOF
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