PYROELECTRIC DETECTION DEVICE WITH RIGID MEMBRANE

Pyroelectric detection device, including at least:a substrate;a membrane arranged on the substrate;a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second ele...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LE RHUN, Gwenaël, FANGET, Stéphane, ROUZAUD, André
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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