VACUUM APPARATUS AND RECOVERY SUPPORT METHOD

VACUUM APPARATUS AND RECOVERY SUPPORT METHOD

A vacuum apparatus (1) equipped with an automatic transport mechanism (4) for transporting a specimen and a sensor (11) for detecting a state of the vacuum apparatus (1) includes: a determining unit which determines whether or not a recoverable error has occurred based on a signal from the sensor (1...

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1. Verfasser: TSUKAMOTO, Kazunori
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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creator TSUKAMOTO, Kazunori
description A vacuum apparatus (1) equipped with an automatic transport mechanism (4) for transporting a specimen and a sensor (11) for detecting a state of the vacuum apparatus (1) includes: a determining unit which determines whether or not a recoverable error has occurred based on a signal from the sensor (11); and a display control unit (102) which causes, when it is determined that a recoverable error has occurred, a display unit (130) to display (102) procedure of a recovery operation in a wizard format, wherein the display control unit determines whether or not the recovery operation has been performed according to the procedure displayed on the display unit (130) based on a signal from the sensor (11), and causes the display unit (130) to display next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.
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subjects BASIC ELECTRIC ELEMENTS
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
title VACUUM APPARATUS AND RECOVERY SUPPORT METHOD
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