OPENER APPARATUS

An opener apparatus that accommodates and opens a substrate carrier stack of substrate carriers stacked in a vertical direction, includes a movement mechanism that moves all of the substrate carriers or a sub-group of the substrate carriers relatively with respect to each other along a vertical axis...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHOBER, Thomas, RAHRBACH, Bernd, FIDDES, John, WOHANKA, Christian, FENNER, Yves, DOVIDS, Gerhard
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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