MULTI-BEAM CHARGED PARTICLE IMAGING APPARATUS

A charged particle imaging apparatus comprising:- A specimen holder, for holding a specimen;- A particle-optical column, for:* Producing a plurality of charged particle beams, by directing a progenitor charged particle beam onto an aperture plate having a corresponding plurality of apertures within...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mohammadi-Gheidari, Ali, Sed'a, Bohuslav, Marek, Uncovsky
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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