GAS SENSOR WITH BRIDGE STRUCTURE

A gas sensor comprises a silicon substrate (1) having a recess or opening (2) formed therein. A thin-film bridge (3) is arranged over the recess or opening and forms a hotplate (6) receiving a patch (8) of sensing material. The hotplate (6) is formed by a circular central section (5) of the bridge (...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kuemin, Cyrill, Hitzbleck, Martina, Moeller, Nicolas, Merz, Matthias
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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