CORE WIRE FOR USE IN SILICON DEPOSITION, METHOD FOR PRODUCING SAID CORE WIRE, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON

Efficiency of producing polycrystalline silicon is improved. A silicon filament (11) is constituted by a rod-shaped member made of polycrystalline silicon. The polycrystalline silicon has an interstitial oxygen concentration of not less than 10 ppma and not more than 40 ppma. On a side surface, in a...

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Hauptverfasser:	INOUE, Yuji, NISHIKAWA, Masayoshi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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