MANUFACTURING DEVICE CONTROL BASED ON METROLOGY DATA

A method includes receiving topic names (121) from a metrology interface device (120), where the topic names (121) correspond to data generated by metrology devices (102, 104, 502) associated with a manufacturing operation. The method also includes accessing a data stream (131) from the metrology in...

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Bibliographische Detailangaben

Hauptverfasser:	DOYLE, Joseph, SIVICH, Lorrie, FOROUHAR, Farshad, PODNAR, Gregg W, GRUBE, Robert W, RULE, Carrie, ZAYIC, Jerry D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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