SYSTEMS AND METHODS FOR FABRICATION OF SUPERCONDUCTING INTEGRATED CIRCUITS

Various techniques and apparatus permit fabrication of superconductive circuits. A superconducting integrated circuit comprising a superconducting stud via, a kinetic inductor, and a capacitor may be formed. Forming a superconducting stud via in a superconducting integrated circuit may include maski...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OH, Byong, H, LADIZINSKY, Nicolas, C, BUNYK, Paul, I, STADTLER, Douglas, P, HUANG, Shuiyuan, ALTOMARE, Fabio, YAO, Jason, J, HARRIS, Richard, G, LADIZINSKY, Eric, G, WHITTAKER, Jed, D, ENDERUD, Colin, C, SWENSON, Loren, J, STERPKA, Edward, G
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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