A THIN PLASTIC POLISHING ARTICLE FOR CMP APPLICATIONS

A method and apparatus for polishing a substrate that includes a polishing article comprising a polymeric sheet having a raised surface texture, which is formed on the surface of the polymeric sheet is provided. According to one or more implementations of the present disclosure, an advanced polishin...

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Bibliographische Detailangaben

Hauptverfasser:	WANG, You, MENK, Gregory E, TRAN, Huyen Karen, GURUSAMY, Jay, KAKIREDDY, Veera Raghava Reddy, REDEKER, Fred C, TOLLES, Robert D, MIKHAYLICHENKO, Ekaterina, DAVEY, Eric
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING
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