DEVICE AND METHOD FOR MONITORING THE LEAK-TIGHTNESS OF A TRANSPORT ENCLOSURE FOR THE ATMOSPHERIC CONVEYANCE AND STORAGE OF SEMICONDUCTOR SUBSTRATES
There is provided a device and method for controlling a tightness of at least one transport enclosure for conveyance and atmospheric storage of semiconductor substrates, the transport enclosure including at least two ventilation ports, the device including at least one interface configured to be cou...
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| creator | BELLET, Bertrand BOUNOUAR, Julien CHAPEL, Nicolas |
| description | There is provided a device and method for controlling a tightness of at least one transport enclosure for conveyance and atmospheric storage of semiconductor substrates, the transport enclosure including at least two ventilation ports, the device including at least one interface configured to be coupled to the transport enclosure, the interface including at least two connecting heads, at least one connecting head of the heads being formed by a measurement head configured to engage in a ventilation port of the ventilation ports of the transport enclosure, the measurement head including a projecting end piece, opening through at least one aperture, and a peripheral sealing element surrounding the end piece, all of the ventilation ports of the transport enclosure being coupled to the connecting head of the interface. There is also provided a method for controlling the tightness of the transport enclosure. |
| format | Patent |
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There is also provided a method for controlling the tightness of the transport enclosure.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR |
| title | DEVICE AND METHOD FOR MONITORING THE LEAK-TIGHTNESS OF A TRANSPORT ENCLOSURE FOR THE ATMOSPHERIC CONVEYANCE AND STORAGE OF SEMICONDUCTOR SUBSTRATES |
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