INTEGRATED THERMOELECTRIC GENERATOR AND RELATED METHOD OF FABRICATION

An integrated thermoelectric generator of out-of-plane heat flux configuration can be fabricated with a process fully compatible with standard front-end CMOS or BiCMOS technologies, if portions of the planar electrically non conductive cover layer suspended over the valleys have sufficiently large t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SPAZIANI, Fabio, MASCOLO, Danilo, LATESSA, Giuseppe, BUOSCIOLO, Antonietta, IULIANELLA, Enrico, GISON, Italo, NARDUCCI, Dario
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!