EVALUATING QUALITY OF A PRODUCT SUCH AS A SEMICONDUCTOR SUBSTRATE

An evaluation device may include: a receiving unit that receives an image of the semiconductor substrate, the image captured by an imaging device provided on the semiconductor substrate manufacturing apparatus; a determination unit that determines, using a neural network, at least one value represen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUGAHARA, Hiroshi, ANDO, Tanichi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CALCULATING COMPUTING COUNTING PHYSICS
Online-Zugang:	Volltext bestellen
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