APPARATUS AND METHOD FOR PROCESSING A GLASS SUBSTRATE
Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supp...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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