MICROPUMPS

A micropump including a substrate and a membrane attached to the substrate. The membrane may be deformable away from the substrate to increase a volume enclosed by the substrate and the membrane, and a portion of the membrane may be configured to be an inlet for entry into the volume.

Bibliographische Detailangaben

Hauptverfasser:	JEON, Jin Han, VEMULAMADA, Pardhasaradhi, PALALE, Suresh, PIRK, Tjalf, SO, Yong Heng
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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