MICROPUMPS

MICROPUMPS

A micropump including a substrate and a membrane attached to the substrate. The membrane may be deformable away from the substrate to increase a volume enclosed by the substrate and the membrane, and a portion of the membrane may be configured to be an inlet for entry into the volume.

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Hauptverfasser: JEON, Jin Han, VEMULAMADA, Pardhasaradhi, PALALE, Suresh, PIRK, Tjalf, SO, Yong Heng
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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creator JEON, Jin Han
VEMULAMADA, Pardhasaradhi
PALALE, Suresh
PIRK, Tjalf
SO, Yong Heng
description A micropump including a substrate and a membrane attached to the substrate. The membrane may be deformable away from the substrate to increase a volume enclosed by the substrate and the membrane, and a portion of the membrane may be configured to be an inlet for entry into the volume.
format Patent
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language eng ; fre ; ger
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subjects BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
title MICROPUMPS
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