MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING DEVICE, AND FLAT DISPLAY MANUFACTURING DEVICE

To provide a motor capable of preventing particles generated inside from being emitted to the outside, more reliably. The motor includes: a stator that is provided with a coil and a stator core; a rotor that is disposed on the inner side of the stator in a radial direction, and rotated relatively wi...

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Hauptverfasser:	NAKAMURA, Tsuyoshi, WATANABE, Hayao, HIGUCHI, Hideya
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION
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creator	NAKAMURA, Tsuyoshi WATANABE, Hayao HIGUCHI, Hideya
description	To provide a motor capable of preventing particles generated inside from being emitted to the outside, more reliably. The motor includes: a stator that is provided with a coil and a stator core; a rotor that is disposed on the inner side of the stator in a radial direction, and rotated relatively with respect to the stator; a stator housing that has a first exhaust hole through which the air is exhausted by suctioning, and to which the stator is fixed; a first sealing portion where the stator housing and the rotor housing face each other with a first gap therebetween across the entire circumference in the circumferential direction, with the first sealing portion being provided between an internal space and the outside of the stator housing; and a first squeeze portion that is at a position different from the first sealing portion, and that has a second gap connecting the internal space and the first exhaust hole.
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language	eng ; fre ; ger
recordid	cdi_epo_espacenet_EP3499690A1
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subjects	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION
title	MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING DEVICE, AND FLAT DISPLAY MANUFACTURING DEVICE
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