MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING DEVICE, AND FLAT DISPLAY MANUFACTURING DEVICE

To provide a motor capable of preventing particles generated inside from being emitted to the outside, more reliably. The motor includes: a stator that is provided with a coil and a stator core; a rotor that is disposed on the inner side of the stator in a radial direction, and rotated relatively with respect to the stator; a stator housing that has a first exhaust hole through which the air is exhausted by suctioning, and to which the stator is fixed; a first sealing portion where the stator housing and the rotor housing face each other with a first gap therebetween across the entire circumference in the circumferential direction, with the first sealing portion being provided between an internal space and the outside of the stator housing; and a first squeeze portion that is at a position different from the first sealing portion, and that has a second gap connecting the internal space and the first exhaust hole.