POLING OF A PIEZOELECTRIC THIN FILM ELEMENT IN A PREFERRED ELECTRIC FIELD DRIVING DIRECTION

A piezoelectric thin film element is provided comprising a first electrode 26; a piezoelectric layer 24 formed on said first electrode; and a second electrode formed 22 on said piezoelectric layer. The piezoelectric layer is poled, by applying a poling electric field across said piezoelectric layer...

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Bibliographische Detailangaben
Hauptverfasser: HOOK, Michael, KO, Song-Won, MARSON, Silvia, TROLIER-MCKINSTRY, Susan, FRAGKIADAKIS, Charalampos, MARDILOVICH, Peter
Format: Patent
Sprache:eng ; fre ; ger
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