POLING OF A PIEZOELECTRIC THIN FILM ELEMENT IN A PREFERRED ELECTRIC FIELD DRIVING DIRECTION
A piezoelectric thin film element is provided comprising a first electrode 26; a piezoelectric layer 24 formed on said first electrode; and a second electrode formed 22 on said piezoelectric layer. The piezoelectric layer is poled, by applying a poling electric field across said piezoelectric layer...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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