COMPACT MICROWAVE PLASMA APPLICATOR UTILIZING CONJOINING ELECTRIC FIELDS

A plasma applicator includes a plasma discharge tube and a microwave cavity at least partially surrounding a portion of the plasma discharge tube. Microwave energy is coupled to the microwave cavity via a coupling iris. At least two orthogonal dimensions of the microwave cavity are selected such tha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAMAREHI, Mohammad, KELLER, Olivia, HU, Chaolin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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