SYSTEM AND METHOD FOR USE IN DEPTH CHARACTERIZATION OF OBJECTS

A system is described, for use in optical measurement of a sample. The system comprising: an illumination unit configured for providing coherent illumination of one or more selected wavelength ranges and directing it onto one or more selected inspection regions of the sample, a collection unit confi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZALEVSKY, Zeev, GARCIA, Javier, SCHWARZ, Moshe Arie Ariel, CALIFA, Ran, OZANA, Nisim Nisan
Format: Patent
Sprache:eng ; fre ; ger
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