APPARATUS FOR PROCESSING A SEMICONDUCTOR DEVICE

The invention provides an apparatus, for processing a semiconductor device, comprising a first tool which comprises a pressure application component, a guide, and a spacer moveable in the guide. A gap is defined between the spacer and the guide and is operable to allow the spacer to tilt in relation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ding, Jiapei, Yan, Kar Weng, Liao, Jian, Mouleeswaran, Deivasigamani, Yuan, Bin, Song, Keng Yew, Kuah, Teng Hock
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!