METHOD TO OPERATE AN APPARATUS FOR FEEDING LIQUID METAL TO AN EVAPORATOR DEVICE

A method to operate an apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the feed tube runs from a container adapted to contain a liquid metal to the evaporator device and wherein an electromagnetic pump is provided in the feed tube and a valve in the feed tube...

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Hauptverfasser: BAKKER, Eduard, Paul, Mattheus, ZOESTBERGEN, Edzo, KAISER, Timothy, Dean, COMMANDEUR, Colin, HAMILTON, Douglas, Alexander, WIDDIS, Stephen, James, SNIJDERS, Roland, Jan, HAZELETT, Peter, William
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Sprache:eng ; fre ; ger
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creator BAKKER, Eduard, Paul, Mattheus
ZOESTBERGEN, Edzo
KAISER, Timothy, Dean
COMMANDEUR, Colin
HAMILTON, Douglas, Alexander
WIDDIS, Stephen, James
SNIJDERS, Roland, Jan
HAZELETT, Peter, William
description A method to operate an apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the feed tube runs from a container adapted to contain a liquid metal to the evaporator device and wherein an electromagnetic pump is provided in the feed tube and a valve in the feed tube between the electromagnetic pump and the evaporator device. An at least partially gas permeable electromagnetic pump, which is enclosed in a pressure controlled enclosure, is used in the method wherein electromagnetic pump and the pressure controlled enclosure are controlled such that filling and draining of the evaporator device and feed tube can be done without affecting the vacuum pressure in the vacuum chamber.
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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DIFFUSION TREATMENT OF METALLIC MATERIAL
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title METHOD TO OPERATE AN APPARATUS FOR FEEDING LIQUID METAL TO AN EVAPORATOR DEVICE
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