NOZZLE-TYPE ELECTRON BEAM IRRADIATION DEVICE, AND ELECTRON BEAM STERILIZATION EQUIPMENT EQUIPPED WITH SAME

A nozzle-type electron beam irradiation device (1) includes a vacuum chamber (2), an electron beam generator (3) disposed in the vacuum chamber (2), and a vacuum nozzle (4) that is connected to the vacuum chamber (2) so as to guide an electron beam (E) from the electron beam generator (3) and emit t...

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Bibliographische Detailangaben
Hauptverfasser: SAKAI, Ichiro, NODA, Takeshi, DAIKU, Hiroyuki
Format: Patent
Sprache:eng ; fre ; ger
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