A MEMS REFLECTOR SYSTEM

A compact and robust microelectromechanical reflector system that comprises a support, a reflector, a peripheral edge of the reflector including edge points, and suspenders including piezoelectric actuators and suspending the reflector from the support. Two pairs of suspenders are fixed from two fix...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Torkkeli, Altti, Liukku, Matti
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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