A MEMS REFLECTOR SYSTEM

A MEMS REFLECTOR SYSTEM

A compact and robust microelectromechanical reflector system that comprises a support, a reflector, a peripheral edge of the reflector including edge points, and suspenders including piezoelectric actuators and suspending the reflector from the support. Two pairs of suspenders are fixed from two fix...

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Hauptverfasser: Torkkeli, Altti, Liukku, Matti
Format: Patent
Sprache:eng ; fre ; ger
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OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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creator Torkkeli, Altti
Liukku, Matti
description A compact and robust microelectromechanical reflector system that comprises a support, a reflector, a peripheral edge of the reflector including edge points, and suspenders including piezoelectric actuators and suspending the reflector from the support. Two pairs of suspenders are fixed from two fixing points to the support such that in each pair of suspenders, first ends of a pair of suspenders are fixed to a fixing point common to the pair. A first axis of rotation is aligned to a line running though the two fixing points, and divides the reflector to a first reflector part and a second reflector part. In each pair of suspenders, a second end of one suspender is coupled to the first reflector part and a second end of the other suspender is coupled to the second reflector part.
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subjects OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
title A MEMS REFLECTOR SYSTEM
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